Abkürzung | Erklärung |
3D | Three Dimensional |
ADC | Analog to Digital Converter |
AE | Absorbed Electrons |
AEI | Absorbed Electron Imaging |
AFM | Atomic Force Microscope |
BE | Backscattered Electron (Rückstreuelektronen) |
BEI | Backscattered Electron Imaging |
BF | Bright Field |
BSE | BackScattered Electron (Rückstreuelektronen) |
BSED | BackScattered Electron Detector |
CL | Cathodoluminescence |
DF | Dark Field |
DIB | Dual Ion Beam |
DQE | Detective Quantum Efficiency |
EBIC | Electron Beam Induced Current/Conductivity |
EBSD | Electron BackScattered Diffraction |
EBSP | Electron BackScattered diffraction Pattern |
ECCI | Electron Channeling Contrast Imaging |
ECP | Electron Channeling Pattern |
EDS | Energy Dispersive x-ray Spectrometry |
EDX | Energy Dispersive X-ray spectrometry |
EPMA | Electron Probe MicroAnalysis |
ESEM | Environmental Scanning Electron Microscope |
ESMA | ElektronenStrahl-MikroAnalyse |
E-T | Everhard-Thornley |
FE | Field Emission (Feldemission) |
FEG | Field Emission Gun |
FFT | Fast Fourier Transform |
FIB | Focused Ion Beam |
FIB-REM | Focused Ion Beam Rasterelektronenmikroskop |
FIB-SEM | Focused Ion Beam Scanning Electron Microscope |
FWHM | Full Width at Half Maximum |
GIS | Gas Injection System |
GSR | GunShot Residue |
HV | High Voltage (Hochspannung) |
HR | High Resolution (Hochauflösung) |
IBSC | Ion Beam Slope Cutting (Böschungsätzen) |
IPF | Inverse Pole Figure |
IR | Infrared |
KL | Kathodolumineszens |
LEEM | Low Energy Electron Microscope |
LMIS | Liquid Metal Ion Source |
LM | Ligh Microscope |
OIM | Orientation Imaging Microscopy |
PC | Probe Current (Probenstrom) |
PFIB | Plasma Focused Ion Beam |
PFIB-REM | Plasma Focused Ion Beam Rasterelektronenmikroskop |
PFIB-SEM | Plasma Focused Ion Beam Scanning Electron Microscope |
RE | Rückstreuelektronen |
REM | Rasterelektronenmikroskop |
SDD | Silicon Drift Detector |
SE | Secondary Electron (Sekundärelektronen) |
SED | Secondary Electron Detector |
SEM | Scanning Electron Microscope |
SPM | Scanning Probe Microscope |
TE | Transmitted Electron (Transmittierte Elektronen) |
TEM | Transmission Electron Microscope |
TOF-SIMS | Time-Of-Flight Secondary Ion Mass Spectrometer/Spectrometry |
UHV | Ultra High Vacuum |
UPS | Uninterrupted Power Supply |
UV | UltraViolet |
VP | Variable Pressure |
WD | Working Distance (Arbeitsabstand) |
WDS | Wavelength Dispersive x-ray Spectrometry |
WDX | Wavelength Dispersive X-ray spectrometry |
YAG | Yttrium Aluminium Garnet |
